Amit Mishra

Title: Inventor Amit Mishra: Innovating Molybdenum Processing

Introduction

Amit Mishra, located in Tempe, AZ, is a notable inventor recognized for his contributions to the field of materials processing, particularly involving molybdenum layers. With a remarkable achievement of holding two patents, his innovative work has significant implications in various applications within the semiconductor and materials industries.

Latest Patents

Mishra's latest patents showcase advanced methodologies and apparatuses central to the etching and deposition of molybdenum films:

1. **Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals:** This invention discloses a sophisticated apparatus and method to clean or etch molybdenum or molybdenum nitride films from the interiors of reaction chambers in a reaction system. The core of the innovation lies in utilizing a remote plasma unit to activate a halide precursor mixed with an inert gas, creating a radical gas that reacts with the molybdenum films, forming a removable by-product facilitated by a purge gas.

2. **Method for depositing molybdenum layers using an underlayer:** This patent presents methods for forming molybdenum layers on substrate surfaces. The process includes the formation of an underlayer that helps manipulate the stress within the molybdenum layer, reducing the nucleation and deposition temperatures, thus enabling more efficient fabrication of various structures and devices.

Career Highlights

Amit Mishra works at ASM IP Holding B.V., contributing to cutting-edge advancements in material deposition techniques. His role involves applying his expertise to develop innovative solutions that enhance manufacturing processes and ensure higher quality standards in the end products.

Collaborations

Throughout his career, Mishra has collaborated with notable coworkers, including Paul F. Ma and Roghayyeh Lotfi. Together, they have contributed to several research projects and patent applications, furthering advancements in materials science and engineering.

Conclusion

Amit Mishra's inventive contributions to the field of molybdenum processing exemplify the critical role of innovation in advancing technology. His patents not only highlight his expertise but also pave the way for future developments within the semiconductor industry. As technology continues to evolve, inventors like Mishra play an essential part in transforming innovative ideas into practical solutions.