The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Jul. 15, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Paul Ma, Scottsdale, AZ (US);
Roghayyeh Lotfi, Scottsdale, AZ (US);
Jaebeom Lee, Tempe, AZ (US);
Eric Christopher Stevens, Tempe, AZ (US);
Amit Mishra, Tempe, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/06 (2006.01); C23C 16/455 (2006.01); C23C 28/00 (2006.01); C23C 16/30 (2006.01); C23C 16/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/06 (2013.01); C23C 16/303 (2013.01); C23C 16/305 (2013.01); C23C 16/32 (2013.01); C23C 16/45527 (2013.01); C23C 28/341 (2013.01);
Abstract
Methods for forming molybdenum layers on a surface of a substrate and structures and devices formed using the methods are disclosed. Exemplary methods include forming an underlayer prior to forming the molybdenum layer. The underlayer can be used to manipulate stress in the molybdenum layer and/or reduce a nucleation temperature and/or deposition temperature of a step of forming the molybdenum layer.