Alexander Yuri Usenko

Title: Innovations by Alexander Yuri Usenko

Introduction

Alexander Yuri Usenko is a prominent inventor based in Murray Hill, NJ (US). He holds a total of 14 patents that showcase his contributions to the field of semiconductor technology. His work primarily focuses on the development of silicon-on-insulator (SOI) wafers, which are crucial for modern electronic devices.

Latest Patents

One of his latest patents is a method of making a silicon-on-insulator wafer through a process known as bond and etch back—BESOI. This innovative technique involves forming a boron etch stop via BF2+ ion implantation, followed by solid phase epitaxy (SPE). The process utilizes fluorine getters to enhance the immunity of the final wafer against oxidation-induced stacking faults (OISFs). By optimizing the temperature during the epitaxy process, Usenko's method ensures high etch selectivity and minimizes boron diffusion. This approach allows semiconductor foundries to manufacture SOI wafers using standard equipment, making it a cost-effective solution for in-house production.

Another significant patent involves a low-temperature method for creating silicon-on-insulator wafers. This process also employs bond and etch back techniques, with fluorine ion implantation performed after bonding. The careful selection of ion energy and dose ensures that the silicon surface remains crystalline while preventing defect generation during subsequent oxidation steps. This innovation is particularly beneficial for RF SOI devices, such as those used in smartphones, as it enhances their performance without the need for high-temperature annealing.

Career Highlights

Throughout his career, Usenko has worked with various companies, including Silicon Wafer Technologies, Inc. His expertise in semiconductor technology has made him a valuable asset in the industry. His innovative approaches to wafer manufacturing have significantly impacted the efficiency and performance of electronic devices.

Collaborations

Usenko has collaborated with notable professionals in the field, including William Ned Carr and Alexander Ulyashin. These partnerships have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.

Conclusion

Alexander Yuri Usenko's contributions to the field of semiconductor technology through his innovative patents have paved the way for advancements in electronic devices. His work continues to influence the industry, demonstrating the importance of innovation in technology.