Location History:
- Lucan, IE (2002 - 2008)
- Fremont, CA (US) (1998 - 2009)
- County Dublin, IE (2009)
- Malahide, IE (2008 - 2011)
- Dublin, IE (2005 - 2014)
- Co Dublin, IE (2014)
Company Filing History:
10 out of 3,777 
5 out of 60 
3 out of 15,475 
Years Active: 1998-2014
Title: Albert R Ellingboe: A Pioneer in Plasma Electronics Innovation
Introduction
Albert R Ellingboe, based in Lucan, Ireland, is an esteemed inventor with a remarkable portfolio of 20 patents. His innovative contributions primarily focus on plasma source technologies and applications within the semiconductor industry. Ellingboe's expertise has significantly influenced the development of advanced plasma processing devices, enhancing the efficiency and effectiveness of semiconductor fabrication.
Latest Patents
Among his latest patents, Ellingboe has developed a unique plasma source electrode. This invention features an electrode tile configuration with contoured edges that effectively control coupling effects. Furthermore, he has described a matrix configuration of these electrode tiles, providing versatility in plasma processing applications. Another notable patent involves a silicon electrode specifically designed for plasma reaction chambers. This electrode allows for the processing of semiconductor substrates, such as single wafers, with a low resistivity of less than 1 ohm-cm. His advanced electrode design incorporates zero defect single crystal silicon or silicon carbide and features an elastomeric joint that enhances its usability. The inclusion of gas outlets with precise diameters promotes optimal plasma processing conditions.
Career Highlights
Ellingboe has made significant strides in his career, having worked with prominent organizations such as Lam Research Corporation and Dublin City University. His work at Lam Research Corporation has allowed him to play a vital role in advancing plasma processing technologies, while his affiliation with Dublin City University demonstrates his commitment to academic research and innovation.
Collaborations
Throughout his career, Ellingboe has collaborated with several esteemed professionals in his field, including Eric H Lenz and Fangli J Hao. These collaborations have fostered a rich exchange of ideas, further driving advancements in plasma technology and semiconductor processing.
Conclusion
Albert R Ellingboe is a notable figure in the field of plasma electronics, with numerous innovations that have paved the way for more efficient semiconductor fabrication methods. With a robust portfolio and a history of collaboration and professional excellence, Ellingboe continues to influence the landscape of plasma technology. His work not only highlights the importance of innovation in the semiconductor industry but also exemplifies the impact of dedicated inventors on modern technology.