The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
May. 11, 2005
Applicant:
Albert Rogers Ellingboe, Malahide, IE;
Inventor:
Albert Rogers Ellingboe, Malahide, IE;
Assignee:
Dublin City University, Dublin, IE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A plasma source is described. The source includes a reactive impedance element formed from a plurality of electrodes. By providing such a plurality of electrodes and powering adjacent electrodes out of phase with one another, it is possible to improve the characteristics of the plasma generated.