Location History:
- Yamanashi, JP (2005 - 2011)
- Tokyo, JP (2012)
Company Filing History:
Years Active: 2005-2012
Title: Akira Iwami: Innovator in Chemical Oxide Removal Processes
Introduction
Akira Iwami is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of chemical processing, particularly in the area of chemical oxide removal. With a total of 4 patents to his name, Iwami's work has had a considerable impact on the industry.
Latest Patents
One of Iwami's latest patents is a method and system for performing a chemical oxide removal process. This innovative processing system includes a first treatment chamber and a second treatment chamber that are coupled to one another. The first treatment chamber features a chemical treatment chamber that provides a temperature-controlled environment, along with an independently temperature-controlled substrate holder for supporting a substrate during chemical treatment. The substrate is exposed to a gaseous chemistry, such as HF/NH, under controlled conditions, including surface temperature and gas pressure. The second treatment chamber is a heat treatment chamber that is thermally insulated from the chemical treatment chamber. It also provides a substrate holder for controlling the temperature of the substrate to thermally process the chemically treated surfaces.
Career Highlights
Iwami is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in chemical processing technologies.
Collaborations
Throughout his career, Iwami has collaborated with several talented individuals, including Masayuki Tomoyasu and Merritt Funk, who is a prominent woman in the field. These collaborations have enriched his work and fostered a creative environment for innovation.
Conclusion
Akira Iwami's contributions to the field of chemical oxide removal processes demonstrate his commitment to innovation and excellence. His patents and work at Tokyo Electron Limited highlight his role as a significant inventor in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.