The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Nov. 12, 2004
Hisato Tanaka, Yamanashi, JP;
Akira Obi, Yamanashi, JP;
Akira Iwami, Yamanashi, JP;
Kazushi Tahara, Yamanashi, JP;
Shigeaki Kato, Miyagi, JP;
Hisato Tanaka, Yamanashi, JP;
Akira Obi, Yamanashi, JP;
Akira Iwami, Yamanashi, JP;
Kazushi Tahara, Yamanashi, JP;
Shigeaki Kato, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S). If it is judged through the diagnosis performed in Sthat no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S). If the processing has been completed, the processing apparatus is stopped (S). If, on the other hand, it is judged through the diagnosis performed in Sthat an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S). The processing apparatus is then stopped (S).