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Nirasaki, Japan

Akihito Toda

USPTO Granted Patents = 6 (Patent Applications = 1)

Average Co-Inventor Count = 1.7

ph-index = 5

Forward Citations = 101(Granted Patents)

Location History:

Yamanashi, JP (1992 - 1995)
Yamanashi-ken, JP (1999 - 2001)
Nirasaki, JP (2007 - 2011)

Company Filing History:

6 out of 10,341

Tokyo Electron Limited

Tokyo Electron Yamanashi Limited

where one patent can have more than one assignee

Years Active: 1992-2011

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8058585 - Plasma processing method, plasma processing apparatus and storage medium (2011-11-15),

2. 7297635 - Processing method (2007-11-20),

3. 6299722 - Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an object (2001-10-09),

4. 5858878 - Semiconductor wafer etching method and post-etching process (1999-01-12),

5. 5385624 - Apparatus and method for treating substrates (1995-01-31),

6. 5147493 - Plasma generating apparatus (1992-09-15),

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