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Utsunomiya, Japan

Akihiro Yamada

USPTO Granted Patents = 9 (Patent Applications = 3)

EPO Patents = 1

Average Co-Inventor Count = 1.2

ph-index = 3

Forward Citations = 21(Granted Patents)

Location History:

Tochigi, JP (2006)
Utsunomiya, JP (2009 - 2015)
Sakura, JP (2018)

Company Filing History:

9 out of 90,631

Canon Kabushiki Kaisha

Years Active: 2006-2025

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9 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12313399 - Three-dimensional measurement apparatus, system, and production method (2025-05-27),

2. 10068350 - Measurement apparatus, system, measurement method, determination method, and non-transitory computer-readable storage medium (2018-09-04),

3. 9062957 - Multi-wavelength interferometer, measurement apparatus, and measurement method (2015-06-23),

4. 8786822 - Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method (2014-07-22),

5. 7602474 - Exposure apparatus (2009-10-13),

6. 7525639 - Exposure apparatus and method, and device manufacturing method using the same (2009-04-28),

7. 7474380 - Projection optical system, exposure apparatus, and device fabrication method (2009-01-06),

8. 7060994 - Exposure apparatus and method (2006-06-13),

9. 7057708 - Projection optical system, exposure apparatus and device fabrication method (2006-06-06),

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