The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7057708 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 06, 2006

Filed:

Dec. 17, 2004
Applicant:

Akihiro Yamada, Tochigi, JP;

Inventor:

Akihiro Yamada, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/32 (2006.01); G03B 27/42 (2006.01); G02F 1/07 (2006.01);
U.S. Cl.
CPC ...
Abstract

A projection optical system includes a first optical element that orients an axis [1 1 1] as a crystal orientation in a cubic system crystal parallel to an optical axis, and a second optical element that orients an axis [1 0 0] as the crystal orientation in the cubic system crystal so that a minimum angle may be 30° or larger between the optical axis and an off-axis edge beam that passes through the second optical element, and a minimum angle may be 10° or smaller between the optical axis and an off-axis principal ray that passes through the second optical element.


Find Patent Forward Citations

Yamada, Akihiro. (2006). Projection optical system, exposure apparatus and device fabrication method (U.S. Patent No. 7057708). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7057708

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