The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8786822 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 22, 2014

Filed:

Feb. 22, 2010
Applicants:

Akihiro Yamada, Utsunomiya, JP;

Atsushi Shigenobu, Utsunomiya, JP;

Tsuyoshi Kitamura, Kawachi-gun, JP;

Inventors:

Akihiro Yamada, Utsunomiya, JP;

Atsushi Shigenobu, Utsunomiya, JP;

Tsuyoshi Kitamura, Kawachi-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system includes a plurality of optical elements, a deformation unit configured to deform a deformable optical element satisfying a following conditional formula included in the plurality of optical elements by applying a force to the deformable optical element:0.75<0<0.95where EA0 represents an effective aperture of each of the plurality of optical elements and EA represents an axial light flux diameter of each of the plurality of optical elements, and a control unit configured to control the deformation unit, wherein n positions on an outer circumference of the deformable optical element are fixed, the deformation unit includes n actuators, the n actuators apply forces to n positions on the outer circumference other than the fixed n positions, and the control unit controls each of the n actuators independently.


Find Patent Forward Citations

Yamada, Akihiro. (2014). Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method (U.S. Patent No. 8786822). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8786822

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