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Utsunomiya, Japan

Atsushi Shigenobu

This inventor holds 10 USPTO granted patents and 5 published patent applications. Top assignee: Canon Kabushiki Kaisha. Active years: 2010-2024.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Atsushi Shigenobu. Retrieved from https://idiyas.com/inventor/atsushi-shigenobu

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 10 (Patent Applications = 5)

% Patents Active = 60.0

Average Co-Inventor Count = 1.8

ph-index = 1

Forward Citations = 5(Granted Patents)

Location History:

Utsunomiya, JP (2010 - 2021)
Tochigi, JP (2024)

Company Filing History:

10 out of 93,085

Canon Kabushiki Kaisha

Years Active: 2010-2024

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12130562 - Method of obtaining array of plurality of regions on substrate, exposure apparatus, method of manufacturing article, non-transitory storage medium, and information processing apparatus (2024-10-29),

2. 11947267 - Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus (2024-04-02),

3. 11199784 - Exposure apparatus and article manufacturing method (2021-12-14),

4. 11061337 - Exposure apparatus and article manufacturing method (2021-07-13),

5. 9116444 - Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device (2015-08-25),

6. 8786822 - Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method (2014-07-22),

7. 8741510 - Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device (2014-06-03),

8. 8634061 - Exposure apparatus and device manufacturing method (2014-01-21),

9. 8564758 - Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection system (2013-10-22),

10. 7643125 - Exposure apparatus and device manufacturing method (2010-01-05),

Profile summary based on public USPTO records.

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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