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For the Inventor, By the Inventor

Utsunomiya, Japan

Atsushi Shigenobu

USPTO Granted Patents = 10 

Average Co-Inventor Count = 1.8

ph-index = 1

Forward Citations = 5(Granted Patents)


Location History:

  • Utsunomiya, JP (2010 - 2021)
  • Tochigi, JP (2024)

Company Filing History:

goldMedal10 out of 90,697 
 
Canon Kabushiki Kaisha
 patents

Years Active: 2010-2024

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10 patents (USPTO):Explore Patents
1. 12130562 - Method of obtaining array of plurality of regions on substrate, exposure apparatus, method of manufacturing article, non-transitory storage medium, and information processing apparatus (2024-10-29),
2. 11947267 - Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus (2024-04-02),
3. 11199784 - Exposure apparatus and article manufacturing method (2021-12-14),
4. 11061337 - Exposure apparatus and article manufacturing method (2021-07-13),
5. 9116444 - Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device (2015-08-25),
6. 8786822 - Projection optical system with deformable optical element, exposure apparatus, and device manufacturing method (2014-07-22),
7. 8741510 - Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device (2014-06-03),
8. 8634061 - Exposure apparatus and device manufacturing method (2014-01-21),
9. 8564758 - Exposure apparatus and method of decreasing fluctuations in optical characteristics of projection system (2013-10-22),
10. 7643125 - Exposure apparatus and device manufacturing method (2010-01-05),
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