Location History:
- Nakakubiki-gun, JP (2002 - 2005)
- Niigata-ken, JP (2007 - 2008)
- Jyoetsu, JP (2014 - 2015)
- Joetsu, JP (2009 - 2023)
Company Filing History:
Years Active: 2002-2023
Title: Akihiro Seki: Innovator in Positive Resist Composition
Introduction
Akihiro Seki is a prominent inventor based in Joetsu, Japan. He has made significant contributions to the field of materials science, particularly in the development of positive resist compositions used in photolithography. With a total of 15 patents to his name, Seki's work has had a substantial impact on the semiconductor industry.
Latest Patents
One of Seki's latest patents is focused on a positive resist composition that includes two onium salts, a base polymer with acid labile group-containing recurring units, and an organic solvent. This innovative composition is designed to form patterns with enhanced properties, including improved depth of focus (DOF) and line width roughness (LWR). Another notable patent involves a patterning process that utilizes a resist composition comprising a polymer with recurring units featuring an acid labile group of cyclopentyl. This process allows for the creation of fine hole patterns with high dissolution contrast and excellent size control.
Career Highlights
Seki has dedicated his career to advancing the technology behind photolithography materials. His work at Shin-Etsu Chemical Co., Ltd. has positioned him as a key player in the development of cutting-edge resist compositions. His patents reflect a commitment to improving the performance and reliability of materials used in semiconductor manufacturing.
Collaborations
Throughout his career, Seki has collaborated with notable colleagues, including Katsuya Takemura and Youichi Ohsawa. These partnerships have fostered innovation and contributed to the success of various projects within the company.
Conclusion
Akihiro Seki's contributions to the field of positive resist compositions have established him as a leading inventor in the semiconductor industry. His innovative patents and collaborative efforts continue to influence advancements in photolithography technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.