The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Oct. 28, 2004
Applicants:
Takeru Watanabe, Niigata-ken, JP;
Takeshi Kinsho, Niigata-ken, JP;
Katsuya Takemura, Niigata-ken, JP;
Akihiro Seki, Niigata-ken, JP;
Inventors:
Takeru Watanabe, Niigata-ken, JP;
Takeshi Kinsho, Niigata-ken, JP;
Katsuya Takemura, Niigata-ken, JP;
Akihiro Seki, Niigata-ken, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03C 5/00 (2006.01); C07D 235/00 (2006.01); C07D 401/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Resist compositions comprising nitrogen-containing organic compounds having a benzimidazole structure and a specific ether chain moiety have an excellent resolution, form precisely configured patterns with minimized roughness of sidewalls and are useful in microfabrication using electron beams or deep-UV light.