Ai-Jen Hung

Title: Innovations of Ai-Jen Hung in Lithographic Processes

Introduction

Ai-Jen Hung is a notable inventor based in Nantou County, Taiwan. He has made significant contributions to the field of lithography, particularly in the development of methods that enhance wafer alignment and processing. With a total of 5 patents to his name, his work has had a considerable impact on semiconductor manufacturing.

Latest Patents

Ai-Jen Hung's latest patents focus on lithographic overlay correction and lithographic processes. One of his methods involves receiving a wafer and measuring its surface topography. He calculates a topographical variation based on this measurement and performs alignment compensation accordingly. If the variation is less than a predetermined value, a single-zone alignment compensation is applied. Conversely, if the variation exceeds this value, a multi-zone alignment compensation is performed. This innovative approach ensures precise wafer alignment, which is crucial for effective lithography.

Another patent by Ai-Jen Hung also addresses lithographic overlay correction. This method includes defining multiple zones over the wafer and performing multi-zone alignment compensation for each zone. By applying an equation along a specific direction, he obtains compensation values for each zone. The wafer alignment and lithography exposure are then executed zone-by-zone, enhancing the overall efficiency and accuracy of the lithographic process.

Career Highlights

Ai-Jen Hung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in lithographic processes has positioned him as a key player in advancing technology within the company.

Collaborations

Throughout his career, Ai-Jen Hung has collaborated with talented individuals such as Heng-Hsin Liu and Chin-Chen Wang. These collaborations have fostered innovation and contributed to the success of various projects in the field of semiconductor manufacturing.

Conclusion

Ai-Jen Hung's contributions to lithographic processes demonstrate his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in wafer alignment and processing. Through his work, he continues to influence advancements in technology and manufacturing practices.