This inventor holds 4 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2015-2026.
Company Filing History:
Years Active: 2015-2026
Title: Abraham Palaty: Innovator in Substrate Processing Technology
Introduction
Abraham Palaty is a notable inventor based in Thrissur, India. He has made significant contributions to the field of substrate processing technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of heating modules and retaining rings used in various applications.
Latest Patents
One of his latest patents is for an "Air shrouds with integrated heat exchanger." This innovative heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module, while a fan circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger and is recirculated, with one or more shrouds directing the gas as it circulates.
Another significant patent is the "Retaining ring with attachable segments." This retaining ring features a generally annular upper portion that connects to a base of a carrier head, along with a lower surface. It includes a plurality of substantially identical arcuate segments that are detachably secured to the upper portion, forming an annular lower portion. Each arcuate segment has an upper surface that abuts the lower surface of the upper portion and a bottom surface that contacts a polishing pad during polishing.
Career Highlights
Abraham Palaty is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies. His work has significantly impacted the efficiency of substrate processing, making him a valuable asset to his company and the industry.
Collaborations
He has collaborated with notable coworkers, including Irfanulla Khuddus Rahmathullah and Aswathnarayanaiah Ravi, contributing to various projects and advancements in their field.
Conclusion
Abraham Palaty's contributions to substrate processing technology through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor. His innovative solutions continue to shape the industry and improve processing techniques.