The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Nov. 18, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Songjae Lee, San Jose, CA (US);
Avinash Shervegar, Karnataka, IN;
Srinivasa Rangappa, Bangalore, IN;
Sundarapandiyan Shanmugam, Bangalore, IN;
Ernesto J. Ulloa, San Jose, CA (US);
Vinodh Ramachandran, Bangalore, IN;
Abraham Palaty, Bangalore, IN;
Jaidev Rajaram, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus for processing a substrate are described herein. More specifically, embodiments described herein relate to separate pre-clean process modules and pre-clean control modules coupled to a cluster tool assembly. Each pre-clean process module and each pre-clean control module are connected by a cable conduit which is configured to have power and control cables passing therethrough between the pre-clean process module and the ore-clean control module. A maintenance passage is formed through the cluster tool assembly. Each of a purge gas source, a process gas source, a manometer, an isolation port, and a throttle valve are all accessible from one side of the pre-clean process module.