The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2015
Filed:
May. 31, 2013
Applied Materials, Inc., Santa Clara, CA (US);
Irfanulla Khuddus Rahmathullah, Bangalore, IN;
Bopanna Ichettira Vansantha, Bangalore, IN;
Padma Gopalakrishnan, Fremont, CA (US);
Aswathnarayanaiah Ravi, Bangalore, IN;
Abraham Palaty, Thrissur, IN;
Young J. Paik, Campbell, CA (US);
Stacy Meyer, San Jose, CA (US);
James Klingler, San Jose, CA (US);
Ashish Bhatnagar, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A retaining ring includes an annular lower portion and an annular upper portion. The annular lower portion has a main body with a bottom surface for contacting a polishing pad during polishing, an inner rim projecting upward from the main body, an outer rim projecting upward from the main body and separated from the inner rim by a gap, and a plurality of azimuthally separated interlock features positioned between the inner rim and the outer rim, each interlock feature projecting upwardly from the main body. The annular upper portion has a top surface and a bottom surface and a plurality of azimuthally separated recesses in the bottom surface, the recesses defining thin portions of the upper portion, the plurality of interlock features fitting into the plurality of recesses. The lower portion is a plastic and the upper portion is a material that is more rigid than the plastic.