The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Apr. 26, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Abraham Palaty, Thrissur, IN;
Vinodh Ramachandran, Bangalore, IN;
Shu-Kwan Lau, Sunnyvale, CA (US);
Shainish Nellikka, Bangalore, IN;
Raja Murali Dhamodharan, Madurai, IN;
Danny D. Wang, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F28D 1/02 (2006.01); F28D 1/047 (2006.01); F28F 1/24 (2006.01);
U.S. Cl.
CPC ...
F28D 1/0226 (2013.01); F28D 1/024 (2013.01); F28D 1/0477 (2013.01); F28F 1/24 (2013.01); F28D 2001/0286 (2013.01);
Abstract
A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.