The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Mar. 19, 2014
Applied Materials, Inc., Santa Clara, CA (US);
Irfanulla Khuddus Rahmathullah, Bangalore, IN;
Bopanna Ichettira Vansantha, Bangalore, IN;
Padma Gopalakrishnan, Fremont, CA (US);
Abraham Palaty, Thrissur, IN;
Aswathnarayanaiah Ravi, Bangalore, IN;
Ashish Bhatnagar, Fremont, CA (US);
Young J. Paik, Campbell, CA (US);
Stacy Meyer, San Jose, CA (US);
Daniel Martin, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of the arcuate segments has an upper surface that abuts the lower surface of the upper portion and a bottom surface for contacting a polishing pad during polishing.