Company Filing History:
Years Active: 2013-2019
Title: The Innovative Contributions of Daniel Martin
Introduction
Daniel Martin is a notable inventor based in Cupertino, California. He has made significant contributions to the field of technology, particularly in substrate processing and polishing systems. With a total of five patents to his name, Martin's work has had a considerable impact on the industry.
Latest Patents
Among his latest patents is a thermal radiation barrier for substrate processing chamber components. This invention provides an apparatus for a substrate support heater and associated chamber components that reduce energy losses. The substrate support heater includes a heater body with a first surface to receive a substrate and a second surface opposing it. A heating element is disposed within the heater body, and a thermal barrier is placed on the second surface, consisting of a first layer and a second layer.
Another significant patent is for a coated retaining ring designed for a polishing system. This retaining ring features a process-resistant coating that is thin, smooth, and conformal, providing resistance to wear and chemical attack. The coating is formed through vapor deposition from a precursor gas mixture, which may include polyparaxyxylene. The adhesion of the coating to the retaining ring is enhanced by surface treatment prior to coating application.
Career Highlights
Daniel Martin is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at this organization has allowed him to develop innovative solutions that address industry challenges.
Collaborations
Some of his notable coworkers include Ashish Bhatnagar and Kadthala Ramaya Narendrnath. Their collaboration has contributed to the advancement of technology in their respective fields.
Conclusion
Daniel Martin's innovative contributions and patents reflect his dedication to advancing technology in substrate processing and polishing systems. His work continues to influence the industry and inspire future innovations.