The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2013
Filed:
Mar. 04, 2011
Kadthala R. Narendrnath, San Jose, CA (US);
Ashish Bhatnagar, Fremont, CA (US);
Daniel L. Martin, Cupertino, CA (US);
Robert T. Hirahara, San Jose, CA (US);
Gangadhar Sheelavant, Guledgudd, IN;
Kadthala R. Narendrnath, San Jose, CA (US);
Ashish Bhatnagar, Fremont, CA (US);
Daniel L. Martin, Cupertino, CA (US);
Robert T. Hirahara, San Jose, CA (US);
Gangadhar Sheelavant, Guledgudd, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gas nozzle measurement apparatus comprises a controllable gas source to provide across a gas plate having gas nozzles, a flow of gas at a constant pressure or constant flow rate, and a sensor plate sized to cover an area comprising at least a portion of the front face of the gas plate. The sensor plate comprises gas flow sensors arranged in locations that correspond to positions of individual gas nozzles of the gas nozzles of the gas plate such that each gas flow sensor can measure a pressure, flow rate, density, or velocity of a gas stream passing through the individual gas nozzle that faces the gas flow sensor, and generate a signal indicative of, or display, the pressure, flow rate, density, or velocity of the gas stream passing through the individual gas nozzle.