Company Filing History:
Years Active: 2011-2021
Title: The Innovative Contributions of Robert Hirahara
Introduction
Robert Hirahara is a prominent inventor based in San Jose, CA. He has made significant contributions to the field of electrostatic chucking technology, holding a total of 13 patents. His work focuses on improving methods for substrate handling in semiconductor manufacturing.
Latest Patents
Hirahara's latest patents include innovative methods for substrate chucking and de-chucking. One of his notable inventions is a method that reduces scratches on the non-active surface of a substrate by simultaneously increasing the voltage applied to a chucking electrode and the backside gas pressure. This dual approach enhances the chucking process and ensures a smoother de-chucking operation. Another significant patent involves a method and apparatus for directly measuring the chucking force on an electrostatic chuck. This method utilizes a sensor wafer equipped with multiple pressure sensors to accurately gauge the chucking force, allowing for improved processing of wafers.
Career Highlights
Robert Hirahara is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has been instrumental in advancing technologies that enhance the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Hirahara has collaborated with notable colleagues such as Govinda Raj and Vijay D Parkhe, contributing to a dynamic team focused on innovation in the field.
Conclusion
Robert Hirahara's contributions to electrostatic chucking technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in substrate handling methods.