The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Jan. 21, 2008
Abhi Desai, Fremont, CA (US);
Robert T. Hirahara, San Jose, CA (US);
Calvin Augason, Los Altos, CA (US);
Abhi Desai, Fremont, CA (US);
Robert T. Hirahara, San Jose, CA (US);
Calvin Augason, Los Altos, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 μm. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.