Company Filing History:
Years Active: 2001-2018
Title: Abhi Desai: Innovator in Substrate Processing Technologies
Introduction
Abhi Desai is a notable inventor based in Fremont, CA, who has made significant contributions to the field of substrate processing technologies. With a total of 2 patents to his name, Desai's work focuses on enhancing the efficiency and effectiveness of substrate processing systems.
Latest Patents
Desai's latest patents include the "High Temperature Fine Grain Aluminum Heater" and "Antenna Coil Assemblies for Substrate Processing Chambers." The first patent describes an aluminum heated substrate support designed for high-temperature substrate processing systems. This invention features an aluminum body with an average grain size of less than about 250 micrometers, a stem coupled to the body, and a heating element integrated within the body. The design includes a fully penetrated lap weld at the stem to body joint, which enhances the service life of the substrate support.
The second patent, "Antenna Coil Assemblies for Substrate Processing Chambers," presents innovative antenna coil assemblies that improve substrate processing chambers. This invention includes an antenna coil housed within a frame that features spaced apart tabs around its periphery. The design incorporates notches between adjacent tabs to facilitate thermal expansion and contraction, thereby reducing stress on the frame and coil connections.
Career Highlights
Abhi Desai is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to develop cutting-edge technologies that are crucial for modern substrate processing.
Collaborations
Desai has collaborated with notable coworkers, including Michael P. Karazim and Tetsuya Ishikawa, who have contributed to his innovative projects and advancements in technology.
Conclusion
Abhi Desai's contributions to substrate processing technologies through his patents and work at Applied Materials, Inc. highlight his role as a significant innovator in the field. His inventions are paving the way for advancements in high-temperature processing systems and substrate efficiency.