Applied Materials, Inc.

Abhi Desai

Tetsuya Ishikawa

Tom K Cho

Michael P Karazim

Robert Hirahara

Calvin R Augason

Rudolf Gujer

Pavel Staryuk

Thomas Kring

Michael Douglas

An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 &#x3bc;m. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.

High temperature fine grain aluminum heater

The present invention provides exemplary antenna coil assemblies and substrate processing chambers using such assemblies. In one embodiment, an antenna coil assembly (,) for a substrate processing chamber includes an antenna coil (,) disposed in a frame (,). The frame includes a plurality of spaced apart tabs (,) around a periphery of the frame, with the coil coupled to the frame at the tabbed locations. At least one notch (,) is provided between each pair of adjacent tabs. The notches are adapted to facilitate thermal expansion and contraction of the frame at the notched locations to reduce stresses on the frame and coil connections.

Antenna coil assemblies for substrate processing chambers

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Fremont, CA, United States of America

Abhi Desai