The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Sep. 17, 1999
Michael P. Karazim, San Jose, CA (US);
Tetsuya Ishikawa, Santa Clara, CA (US);
Rudolf Gujer, Saratoga, CA (US);
Thomas Kring, Fremont, CA (US);
Pavel Staryuk, San Jose, CA (US);
Abhi Desai, Fremont, CA (US);
Tom Cho, San Jose, CA (US);
Michael Douglas, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides exemplary antenna coil assemblies and substrate processing chambers using such assemblies. In one embodiment, an antenna coil assembly (,) for a substrate processing chamber includes an antenna coil (,) disposed in a frame (,). The frame includes a plurality of spaced apart tabs (,) around a periphery of the frame, with the coil coupled to the frame at the tabbed locations. At least one notch (,) is provided between each pair of adjacent tabs. The notches are adapted to facilitate thermal expansion and contraction of the frame at the notched locations to reduce stresses on the frame and coil connections.