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For the Inventor, By the Inventor

Pliezhausen, Germany

Steag Micro Tech Gmbh


USPTO Granted Patents = 30

% Expired Patents = 16.7

Forward Citations = 244

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29 inventors (with patents filed for the assignee):

goldMedal Martin Weber (8 out of 8 patents)

silverMedal John Oshinowo (7 out of 7 patents)

bronzeMedal Joachim Pokorny (4 out of 4 patents)

4.  Andreas Steinrücke (3 out of 3 patents)

5.  Klaus Conrad Wolke (2 out of 5 patents)

6.  Dietmar Schonleber (2 out of 2 patents)

7.  Karl Appich (2 out of 3 patents)

8.  Marc A Meuris (2 out of 27 patents)

9.  Ulrich Speh (1 out of 2 patents)

10.  Jens Schneider (1 out of 1 patent)

11.  Uwe Müller (1 out of 2 patents)

12.  Ludwig Denzler (1 out of 2 patents)

13.  Jürgen Lohmüller (1 out of 1 patent)

14.  Dietmar Schönleber (1 out of 1 patent)

15.  Robert Boos (1 out of 1 patent)


30 patents:

1. 6805754 - Device and method for processing substrates (2004-10-19),
2. 6799588 - Apparatus for treating substrates (2004-10-05),
3. 6647641 - Device and method for the treatment of substrates in a fluid container (2003-11-18),
4. 6607604 - Method and apparatus for treating substrates (2003-08-19),
5. 6569302 - Substrate carrier (2003-05-27),
6. 6539956 - Method and device for drying substrates (2003-04-01),
7. 6523552 - Facility for treating objects in a process tank (2003-02-25),
8. 6488987 - Apparatus and method for processing substrates (2002-12-03),
9. 6488779 - Method and apparatus for cleaning substrates (2002-12-03),
10. 6379470 - Method and device for treating substrates (2002-04-30),
11. 6360921 - Bellows-type dispensing pump (2002-03-26),
12. 6352084 - Substrate treatment device (2002-03-05),
13. 6270585 - Device and process for treating substrates in a fluid container (2001-08-07),
14. 6269822 - Installation for wet-treating substrates (2001-08-07),
15. 6257255 - Substrate treatment device (2001-07-10),
STEAG Micro Tech GmbH is a leading global supplier and technology partner for process equipment in the semiconductor industry. They offer innovative solutions for the production of microelectronic components, such as wafer handling and inspection systems. With a strong focus on research and development, Steag Micro Tech GmbH continuously strives to provide cutting-edge technologies and meet the evolving demands of the semiconductor market.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 22 2026

30 Patents

#1 in

#1,599 in Germany

#21,826 in the World

Pliezhausen, DE
Pliezhausen, Germany

Steag Micro Tech Gmbh

Forward Citations = 244

29 inventors:

goldMedal Martin Weber (8 out of 8 patents)

silverMedal John Oshinowo (7 out of 7 patents)

bronzeMedal Joachim Pokorny (4 out of 4 patents)

4.  Andreas Steinrücke (3 out of 3 patents)

5.  Klaus Conrad Wolke (2 out of 5 patents)

Please report any incorrect information to [email protected]
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