The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Jun. 22, 2001
Applicant:
Inventor:
Joachim Pokorny, Hüfingen, DE;
Assignee:
STEAG MicroTech GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/00 ; B05D 1/18 ; B05C 3/00 ; B05C 1/300 ;
U.S. Cl.
CPC ...
B05D 1/00 ; B05D 1/18 ; B05C 3/00 ; B05C 1/300 ;
Abstract
An apparatus and method for processing substrates are provided. The apparatus includes a first processing unit and a second processing unit. A substrate holder is vertically displaceable over the first processing unit, and is guided outside the first and second processing units. In a raised position of the substrate holder relative to the first processing unit, the second processing unit is movable between the substrate holder and the first processing unit.