The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
Jul. 10, 1998
Applicant:
Inventors:
Klaus Wolke, Althengstett, DE;
Martin Weber, Bad Dürrheim, DE;
Assignee:
Steag Microtech GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/10 ;
U.S. Cl.
CPC ...
B08B 3/10 ;
Abstract
In a method for drying substrates, in particular, semiconductor wafers, an especially residue-free drying of the substrates results when, during removal of the substrates from a liquid, a meniscus of the liquid forming at the transition between the substrate surface and the liquid surface is heated. A device for performing the method is disclosed.