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Fremont, CA, United States of America

Pivotal Systems Corporation

USPTO Granted Patents = 23

EPO Patents = 2

Trademarks = 3

Forward Citations = 264

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28 inventors (with patents filed for the assignee):

Joseph R Monkowski (19 out of 27 patents)

Jialing Chen (11 out of 11 patents)

Tao Ding (9 out of 9 patents)

4. Sherk Chung (7 out of 14 patents)

5. James MacAllen Chalmers (7 out of 7 patents)

6. Barton Lane (6 out of 6 patents)

7. Paul Tran (5 out of 5 patents)

8. Adam Monkowski (4 out of 7 patents)

9. Yi Wang (4 out of 4 patents)

10. Sophia Leonidovna Shtilman (4 out of 4 patents)

11. Paxton Ming Kai Chow (3 out of 3 patents)

12. Jiuyi Cheng (2 out of 2 patents)

13. Vera Alexandrova Snowball (2 out of 2 patents)

14. Abhijit Majumdar (2 out of 2 patents)

15. Travis N Owens (1 out of 11 patents)

23 patents: Sort by Forward Citations

1. 11079035 - Preloaded piezo actuator and gas valve employing the actuator (2021-08-03),

2. 10401202 - Method and apparatus for gas flow control (2019-09-03),

3. 9983595 - Method and apparatus for gas flow control (2018-05-29),

4. 9904297 - Method and apparatus for gas flow control (2018-02-27),

5. 9523435 - Method and apparatus for gas flow control (2016-12-20),

6. 9400004 - Transient measurements of mass flow controllers (2016-07-26),

7. 8857456 - Method and apparatus for in situ testing of gas flow controllers (2014-10-14),

8. 8667830 - Method and apparatus for in situ testing of gas flow controllers (2014-03-11),

9. 8393197 - Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing (2013-03-12),

10. 8271211 - Method and apparatus for enhancing in-situ gas flow measurement performance (2012-09-18),

11. 8271210 - Method and apparatus for enhancing in-situ gas flow measurement performance (2012-09-18),

12. 8265888 - Method and apparatus for enhancing in-situ gas flow measurement performance (2012-09-11),

13. 8240324 - Method and apparatus for in situ testing of gas flow controllers (2012-08-14),

14. 8237928 - Method and apparatus for identifying the chemical composition of a gas (2012-08-07),

15. 8102844 - High-speed SECS message services (HSMS) pass-through including bypass (2012-01-24),

Pivotal Systems Corporation is a leading provider of advanced process control solutions for the semiconductor manufacturing industry. With cutting-edge technology and innovative software, Pivotal helps semiconductor manufacturers optimize their processes, increase yield, and improve overall productivity. Our solutions cover a wide range of applications, including pressure-based process control, advanced metrology, and real-time monitoring. We are committed to delivering reliable, high-performance solutions that empower our customers to stay ahead in the competitive semiconductor market.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

23 Patents

#87 in Fremont, CA

#3,298 in California

#13,927 in US

#26,804 in the World

Fremont, CA, United States of America

Pivotal Systems Corporation

Forward Citations = 264

28 inventors:

Joseph R Monkowski (19 out of 27 patents)

Jialing Chen (11 out of 11 patents)

Tao Ding (9 out of 9 patents)

4. Sherk Chung (7 out of 14 patents)

5. James MacAllen Chalmers (7 out of 7 patents)

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