Barton Lane

Title: The Innovative Contributions of Barton Lane

Introduction

Barton Lane is a notable inventor based in Pleasanton, CA, with a remarkable portfolio of six patents. His work primarily focuses on advancements in gas measurement and leak detection technologies, which are crucial in various industrial applications.

Latest Patents

One of Lane's latest patents is titled "Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing." This invention utilizes argon measurement to detect atmospheric leaks in processing chambers. The presence of argon inside the chamber serves as conclusive evidence of a leak, and the detected amount provides insights into the rate of air entering through the leak. The invention includes embodiments for leak detection in both the main plasma of the processing chamber and in a remote plasma sensor. Additional measurements, such as oxygen levels and moisture presence, can further assist in detecting and quantifying outgassing from the chamber.

Another significant patent by Lane is "Method and apparatus for identifying the chemical composition of a gas." This invention relates to analyzing gas components, particularly in semiconductor manufacturing processes like plasma etching or plasma-enhanced chemical vapor deposition (PECVD). By delivering sufficient power to the plasma of the gas sample, the invention allows for the dissociation of molecules into individual atoms. This process results in emission spectra that simplify the identification of the gas's chemical composition, enabling precise determination of the manufacturing process stage and detection of process endpoints.

Career Highlights

Barton Lane has made significant contributions to the field of gas measurement and leak detection through his innovative patents. His work has been instrumental in enhancing the efficiency and accuracy of processes in semiconductor manufacturing and other industries.

Collaborations

Lane collaborates with talented individuals such as Joseph R Monkowski and Sumer Johal, contributing to a dynamic work environment at Pivotal Systems Corporation.

Conclusion

Barton Lane's innovative patents and contributions to gas measurement and leak detection technologies highlight his importance in the field. His work continues to influence advancements in industrial applications, showcasing the impact of dedicated inventors in technology development.