The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2016
Filed:
Nov. 29, 2011
Joseph R. Monkowski, Danville, CA (US);
Adam J. Monkowski, Pleasanton, CA (US);
Jialing Chen, San Jose, CA (US);
Tao Ding, Pleasanton, CA (US);
Joseph R. Monkowski, Danville, CA (US);
Adam J. Monkowski, Pleasanton, CA (US);
Jialing Chen, San Jose, CA (US);
Tao Ding, Pleasanton, CA (US);
PIVOTAL SYSTEMS CORPORATION, Pleasanton, CA (US);
Abstract
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.