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Forward Citations = 241

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11 inventors (with patents filed for the assignee):

Craig R Simpson (3 out of 4 patents)

Shepard D Johnson (2 out of 20 patents)

John D Wallace (2 out of 3 patents)

4. David S Holbrook (2 out of 2 patents)

5. Robert A McEachern (2 out of 6 patents)

6. J Casey Donaher (1 out of 8 patents)

7. Griffith L Resor, Iii (1 out of 2 patents)

8. Mark S Lucas (1 out of 2 patents)

9. James A Sozanski (1 out of 1 patent)

10. William C Schneider (1 out of 1 patent)

11. Walter H Worth (1 out of 1 patent)

7 patents: Sort by Forward Citations

1. 5991004 - Lens focus shift sensor (1999-11-23),

2. 5828142 - Platen for use with lithographic stages and method of making same (1998-10-27),

3. 5739913 - Non-contact edge detector (1998-04-14),

4. 5677758 - Lithography System using dual substrate stages (1997-10-14),

5. 5483345 - Alignment system for use in lithography utilizing a spherical reflector (1996-01-09),

6. 4855792 - Optical alignment system for use in photolithography and having reduced (1989-08-08),

7. 4769680 - Apparatus and method for making large area electronic devices, such as (1988-09-06),

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Profile summary based on public USPTO records.