Griffith L Resor, Iii

Title: Innovations of Griffith L Resor, III

Introduction

Griffith L Resor, III is a notable inventor based in Acton, MA, with a focus on advanced lithography technologies. He holds two patents that showcase his contributions to the field of electronic device manufacturing. His work emphasizes the importance of precision and efficiency in producing circuit patterns on silicon wafers.

Latest Patents

Resor's latest patents include a high-speed lithography machine and method, which is designed for the rapid production of circuit patterns on silicon wafers. This machine can be utilized for applications such as printing Integrated Circuit (IC) packaging patterns onto wafers before separating IC chips. The innovative design features projection cameras that simultaneously project images onto substrates carried on an X, Y, θ stage. Each camera is equipped with independent alignment systems, light sources, and controls for focus, image placement, image size, and dose. This allows for simultaneous printing even when substrates are slightly misplaced.

Another significant patent is the apparatus and method for making large area electronic devices. This invention involves projecting multiple images from a pair of reticles onto a photo-sensitive coated substrate to create large-scale electronic devices. The apparatus utilizes parallel optical systems positioned to project in the z-direction upon a movable stage, which is controlled in the x- and y-directions. The system includes mechanisms for determining the coordinates of motion and adjusting the relative positions of the reticles and substrate for accurate image projection.

Career Highlights

Throughout his career, Griffith L Resor, III has worked with various companies, including Mrs Technology, Inc. and Azores Corporation. His experience in these organizations has contributed to his expertise in the field of lithography and electronic device manufacturing.

Collaborations

Resor has collaborated with notable individuals such as Robert A McEachern and William C Schneider. These partnerships have likely enhanced his innovative capabilities and contributed to the development of his patented technologies.

Conclusion

Griffith L Resor, III is a distinguished inventor whose work in high-speed lithography and large area electronic devices has made a significant impact on the industry. His patents reflect a commitment to advancing technology and improving manufacturing processes.