For the Inventor, By the Inventor

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Kumamoto, Japan

Mcelectronics Co., Ltd.

USPTO Granted Patents = 3

Forward Citations = 72

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6 inventors (with patents filed for the assignee):

Shimao Yoneyama (1 out of 2 patents)

Osamu Kurosu (1 out of 2 patents)

Kazuhiro Kawaguchi (1 out of 2 patents)

4. Shigekazu Takashima (1 out of 1 patent)

5. Norio Sakamoto (1 out of 1 patent)

6. Georgy Vinogradov (1 out of 1 patent)

3 patents: Sort by Forward Citations

1. 6262584 - IC device temperature control system and IC device inspection apparatus incorporating the same (2001-07-17),

2. 5965034 - High frequency plasma process wherein the plasma is executed by an (1999-10-12),

3. 5292396 - Plasma processing chamber (1994-03-08),

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USPTO Data Jan 1 1976 - Jan 6 2026

3 Patents

#24 in Kumamoto

#8,771 in Japan

Kumamoto, Japan

Mcelectronics Co., Ltd.

Forward Citations = 72

6 inventors:

Shimao Yoneyama (1 out of 2 patents)

Osamu Kurosu (1 out of 2 patents)

Kazuhiro Kawaguchi (1 out of 2 patents)

4. Shigekazu Takashima (1 out of 1 patent)

5. Norio Sakamoto (1 out of 1 patent)

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