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Beneq Oy

USPTO Granted Patents = 61

CIPO Patents = 5

EPO Patents = 32

Trademarks = 11

Forward Citations = 58

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70 inventors (with patents filed for the assignee):

Pekka T Soininen (29 out of 94 patents)

Markku Rajala (8 out of 10 patents)

Jarmo Maula (6 out of 13 patents)

4. Johannes Wesslin (6 out of 6 patents)

5. Mika Jauhiainen (5 out of 5 patents)

6. Kai Asikkala (5 out of 5 patents)

7. Jonas Andersson (5 out of 5 patents)

8. Leif Keto (4 out of 7 patents)

9. Kari Härkönen (4 out of 17 patents)

10. Hulda Aminoff (4 out of 5 patents)

11. Matti Malila (3 out of 3 patents)

12. Olli Pekonen (3 out of 4 patents)

13. Mikko Söderlund (3 out of 3 patents)

14. Anssi Hovinen (3 out of 3 patents)

15. Heikki Naulapää (3 out of 6 patents)

Core Competencies:

Atomic Layer Deposition

Coating Machine

Nozzle Head

Precursor Source

Plasma Etch-Resistant Film

Thin Film Display

Gas Distribution Unit

Surface Treatment Device

Electrically Conductive Oxide Film

Display Device

Aerosol Production

Multilayer Moisture Barrier

61 patents: Sort by Forward Citations

1. 12460292 - Atomic layer deposition apparatus and a method (2025-11-04),

2. 12442081 - Nozzle head and apparatus (2025-10-14),

3. 12421596 - Method and apparatus for processing surface of a semiconductor substrate (2025-09-23),

4. 12180588 - Loading device, arrangement and method for loading a reaction chamber (2024-12-31),

5. 12180587 - Vacuum chamber and arrangement for atomic layer deposition (2024-12-31),

6. 12116668 - Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement (2024-10-15),

7. 12104248 - Gas feeding cup and a gas manifold assembly (2024-10-01),

8. 12000043 - Precursor source arrangement and atomic layer deposition apparatus (2024-06-04),

9. 11970773 - Apparatus and method for atomic layer deposition (ALD) (2024-04-30),

10. 11926896 - Atomic layer deposition apparatus (2024-03-12),

11. 11762510 - Display arrangement and method (2023-09-19),

12. D998660 - Coating machine (2023-09-12),

13. 11702745 - Nozzle and nozzle head (2023-07-18),

14. D978933 - Coating machine (2023-02-21),

15. D978932 - Coating machine (2023-02-21),

BENEQ OY is a global supplier of thin film coating solutions for various industries. With over 40 years of experience in atomic layer deposition (ALD) and aerosol coating technologies, BENEQ provides high-performance coating equipment, materials, and services. They offer solutions for applications such as display technologies, emerging electronics, energy storage, medical devices, and more. BENEQ's advanced thin film coatings enhance the performance, durability, and functionality of various products, contributing to innovation and cutting-edge technology development.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

61 Patents

#17 in Espoo

#60 in Finland

#11,486 in the World

Beneq Oy

Forward Citations = 58

70 inventors:

Pekka T Soininen (29 out of 94 patents)

Markku Rajala (8 out of 10 patents)

Jarmo Maula (6 out of 13 patents)

4. Johannes Wesslin (6 out of 6 patents)

5. Mika Jauhiainen (5 out of 5 patents)

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