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5 inventors (with patents filed for the assignee):

Sang Woo Lee (4 out of 5 patents)

Woo Hyung Choi (3 out of 4 patents)

Nam Hun Kim (1 out of 1 patent)

4. Gyoung Ho Kwon (1 out of 1 patent)

5. Hwi Gon Jang (1 out of 1 patent)

5 patents: Sort by Forward Citations

1. 11841284 - Particle trapping apparatus for preventing an error of a pressure measurement (2023-12-12),

2. 11538702 - Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same (2022-12-27),

3. 11315764 - Structure variable type of a plasma source coil and a method for controlling the same (2022-04-26),

4. 10825655 - Separate plasma source coil and method of controlling the same (2020-11-03),

5. 7524395 - Plasma chamber having plasma source coil and method for etching the wafer using the same (2009-04-28),

Adaptive Plasma Technology Corp. specializes in developing innovative plasma technologies for various applications. With expertise in plasma physics and engineering, the company provides cutting-edge solutions for industries such as semiconductor, aerospace, and medical. Their advanced plasma systems offer high precision and efficiency, enabling customers to enhance their products and processes. Visit their website to learn more about their solutions and capabilities.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 16 2025

5 Patents

#4 in Icheon-si

#1,784 in South Korea

Icheon-si, South Korea

Adaptive Plasma Technology Corp.