The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Jan. 04, 2021
Applicant:
Adaptive Plasma Technology Corp., Icheon-si, KR;
Inventors:
Woo Hyung Choi, Seongnam-si, KR;
Sang Woo Lee, Suwon-si, KR;
Assignee:
ADAPTIVE PLASMA TECHNOLOGY CORP., Icheon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G06T 7/73 (2017.01); B25J 19/00 (2006.01); B25J 19/02 (2006.01); B25J 11/00 (2006.01); H04N 7/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); B25J 11/0095 (2013.01); B25J 19/0025 (2013.01); B25J 19/023 (2013.01); G06T 7/0004 (2013.01); G06T 7/73 (2017.01); H01L 21/68721 (2013.01); H04N 7/18 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.