The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 2017
Filed:
Dec. 08, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Yong Zhang, Cupertino, CA (US);
Tao Luo, Fremont, CA (US);
Chaohong Wu, Mountain View, CA (US);
Stephanie Chen, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for detecting defects on a wafer are provided. One method includes altering one or more design clips based on how the one or more design clips will appear in output generated by a wafer inspection process for a wafer. The method also includes aligning the one or more altered design clips to the output generated for the wafer during the wafer inspection process. In addition, the method includes detecting defects on the wafer based on the output aligned to the one or more altered design clips.