The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Mar. 06, 2015
Applicant:

Xintec Inc., Taoyuan, TW;

Inventors:

Wei-Luen Suen, New Taipei, TW;

Wei-Ming Chien, Taoyuan, TW;

Po-Han Lee, Taipei, TW;

Tsang-Yu Liu, Zhubei, TW;

Yen-Shih Ho, Kaohsiung, TW;

Assignee:

XINTEC INC., Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0232 (2014.01); H01L 31/18 (2006.01); H01L 31/0236 (2006.01); H01L 31/02 (2006.01); H01L 31/0203 (2014.01); H01L 23/31 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02327 (2013.01); H01L 31/02002 (2013.01); H01L 31/0203 (2013.01); H01L 31/02363 (2013.01); H01L 31/1804 (2013.01); H01L 21/561 (2013.01); H01L 23/3114 (2013.01); H01L 2224/11 (2013.01);
Abstract

A semiconductor structure includes a silicon substrate, a protection layer, an electrical pad, an isolation layer, a redistribution layer, a conductive layer, a passivation layer, and a conductive structure. The silicon substrate has a concave region, a step structure, a tooth structure, a first surface, and a second surface opposite to the first surface. The step structure and the tooth structure surround the concave region. The step structure has a first oblique surface, a third surface, and a second oblique surface facing the concave region and connected in sequence. The protection layer is located on the first surface of the silicon substrate. The electrical pad is located in the protection layer and exposed through the concave region. The isolation layer is located on the first and second oblique surfaces, the second and third surfaces of the step structure, and the tooth structure.


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