The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2017

Filed:

May. 05, 2015
Applicant:

Invensas Corporation, San Jose, CA (US);

Inventors:

Guilian Gao, San Jose, CA (US);

Cyprian Emeka Uzoh, San Jose, CA (US);

Charles G. Woychik, San Jose, CA (US);

Hong Shen, Palo Alto, CA (US);

Arkalgud R. Sitaram, Cupertino, CA (US);

Liang Wang, Milpitas, CA (US);

Akash Agrawal, San Jose, CA (US);

Rajesh Katkar, San Jose, CA (US);

Assignee:

Invensas Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 25/00 (2006.01); H01L 23/31 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5385 (2013.01); H01L 21/486 (2013.01); H01L 23/3128 (2013.01); H01L 23/3135 (2013.01); H01L 24/83 (2013.01); H01L 25/0655 (2013.01); H01L 25/50 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48137 (2013.01); H01L 2224/73204 (2013.01); H01L 2924/15192 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/181 (2013.01);
Abstract

Die () and/or undiced wafers and/or multichip modules (MCMs) are attached on top of an interposer () or some other structure (e.g. another integrated circuit) and are covered by an encapsulant (). Then the interposer is thinned from below. Before encapsulation, a layer () more rigid than the encapsulant is formed on the interposer around the die to reduce or eliminate interposer dishing between the die when the interposer is thinned by a mechanical process (e.g. CMP). Other features are also provided.


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