The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
May. 29, 2012
Mingqi LI, Shrewsbury, MA (US);
Emad Aqad, Northborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Ching-lung Chen, Miaoli, TW;
Shintaro Yamada, Shrewsbury, MA (US);
Cheng-bai Xu, Southborough, MA (US);
Joseph Mattia, Framingham, MA (US);
Mingqi Li, Shrewsbury, MA (US);
Emad Aqad, Northborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Ching-Lung Chen, Miaoli, TW;
Shintaro Yamada, Shrewsbury, MA (US);
Cheng-bai Xu, Southborough, MA (US);
Joseph Mattia, Framingham, MA (US);
ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);
Abstract
A photoresist composition comprises an acid-sensitive polymer, and a cyclic sulfonium compound having the formula:(R)—(Ar)—S(—CH—)·OS—(CR)-(L)-Xwherein each Ris independently a substituted or unsubstituted Calkyl group, Caryl group, Caralkyl group, or combination comprising at least one of the foregoing, Ar is a monocyclic, polycyclic, or fused polycyclic Caryl group, each Ris independently H, F, a linear or branched Cfluoroalkyl or a linear or branched heteroatom-containing Cfluoroalkyl, L is a Clinking group optionally comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing heteroatoms, X is a substituted or unsubstituted, Cor greater monocyclic, polycyclic or fused polycyclic cycloaliphatic group, optionally comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing, and 1 is an integer of 0 to 4, m is an integer of 3 to 20, n is an integer of 0 to 4, and p is an integer of 0 to 2.