The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Nov. 04, 2014
Asml Netherlands B.v., Veldhoven, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Erik Roelof Loopstra, Eindhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Jan Bernard Plechelmus Van Schoot, Eindhoven, NL;
Yuri Johannes Gabriël Van de Vijver, Best, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Hendrikus Gijsbertus Schimmel, Utrecht, NL;
Dzmitry Labetski, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A module for producing extreme ultraviolet radiation, including an extreme ultraviolet radiation-emitting source, the source being provided with a supply configured to supply a fluid of an ignition material to a predetermined target ignition position and a target-igniting mechanism constructed and arranged to produce a plasma from the ignition material at the target ignition position, the plasma emitting the extreme ultraviolet radiation; a collector mirror constructed and arranged to focus radiation emitted by the plasma at a focal point; and a heat sink having a thermal energy-diverting surface constructed and arranged to divert thermal energy away from the target ignition position, wherein the heat sink is located at a position proximate the target ignition position.