The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Jun. 25, 2013
Applicant:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Emad Aqad, Northborough, MA (US);
Irvinder Kaur, Westborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Cheng-bai Xu, Southborough, MA (US);
Mingqi Li, Shrewsbury, MA (US);
Gregory P. Prokopowicz, Worcester, MA (US);
Assignee:
ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/06 (2006.01); C07C 309/07 (2006.01); G03F 7/20 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); G03F 7/0045 (2013.01); G03F 7/0395 (2013.01); G03F 7/20 (2013.01);
Abstract
A photoacid generator has the formula (I): wherein R, R, R, L, L, LX, Z, a, b, c, d, p, q, and r, are defined herein. A photoresist comprises the photoacid generator, and a coated article comprises the photoresist. The photoresist can be used to form an electronic device.