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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9110369 B1

PDFFull Text
Date of Patent:
Aug. 18, 2015

Filed:

Jun. 25, 2013

Photoacid generator, photoresist, coated substrate, and method of forming an electronic device

Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Emad Aqad, Northborough, MA (US);

Irvinder Kaur, Westborough, MA (US);

Cong Liu, Shrewsbury, MA (US);

Cheng-bai Xu, Southborough, MA (US);

Mingqi Li, Shrewsbury, MA (US);

Gregory P. Prokopowicz, Worcester, MA (US);

Assignee:

ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);

Attorney:

Cantor Colburn LLP

Primary Examiner:

Anca Eoff

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/06 (2006.01); C07C 309/07 (2006.01); G03F 7/20 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); G03F 7/0045 (2013.01); G03F 7/0395 (2013.01); G03F 7/20 (2013.01);
Abstract

A photoacid generator has the formula (I): wherein R, R, R, L, L, LX, Z, a, b, c, d, p, q, and r, are defined herein. A photoresist comprises the photoacid generator, and a coated article comprises the photoresist. The photoresist can be used to form an electronic device.

Find Patent Forward Citations

Aqad, Emad. (2015). Photoacid generator, photoresist, coated substrate, and method of forming an electronic device (U.S. Patent No. 9110369). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9110369

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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