The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2014
Filed:
Sep. 28, 2007
Antti Rahtu, Helsinki, FI;
Raija Matero, Vantaa, FI;
Markku Leskela, Espoo, FI;
Mikko Ritala, Espoo, FI;
Timo Hatanpaa, Espoo, FI;
Timo Hanninen, Helsinki, FI;
Marko Vehkamaki, Helsinki, FI;
Antti Rahtu, Helsinki, FI;
Raija Matero, Vantaa, FI;
Markku Leskela, Espoo, FI;
Mikko Ritala, Espoo, FI;
Timo Hatanpaa, Espoo, FI;
Timo Hanninen, Helsinki, FI;
Marko Vehkamaki, Helsinki, FI;
ASM International N.V., , NL;
Abstract
Atomic layer deposition (ALD) type processes for producing titanium containing oxide thin films comprise feeding into a reaction space vapor phase pulses of titanium alkoxide as a titanium source material and at least one oxygen source material, such as ozone, capable of forming an oxide with the titanium source material. In preferred embodiments the titanium alkoxide is titanium methoxide.