The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2012
Filed:
Aug. 31, 2011
Sachio Uto, Yokohama, JP;
Minori Noguchi, Yokohama, JP;
Hidetoshi Nishiyama, Yokohama, JP;
Yoshimasa Ohshima, Yokohamai, JP;
Akira Hamamatsu, Yokohama, JP;
Takahiro Jingu, Tokyo, JP;
Toshihiko Nakata, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Minori Noguchi, Yokohama, JP;
Hidetoshi Nishiyama, Yokohama, JP;
Yoshimasa Ohshima, Yokohamai, JP;
Akira Hamamatsu, Yokohama, JP;
Takahiro Jingu, Tokyo, JP;
Toshihiko Nakata, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An inspecting apparatus and method including first and second illuminating units for illuminating a surface of a specimen to be inspected with different incident angles and first and second detecting optical units arranged at different elevation angle directions to the surface of the specimen for detecting images of the specimen illuminated by the first and second illuminating units.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile