The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2009
Filed:
Feb. 02, 2007
Robert Chen, Fremont, CA (US);
Canfeng Lai, Fremont, CA (US);
Xinglong Chen, San Jose, CA (US);
Weiyi Luo, Fremont, CA (US);
Zhong Qiang Hua, Saratoga, CA (US);
Siqing LU, San Jose, CA (US);
Muhammad Rasheed, Fremont, CA (US);
Qiwei Liang, Fremont, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Ellie Y. Yieh, San Jose, CA (US);
Robert Chen, Fremont, CA (US);
Canfeng Lai, Fremont, CA (US);
Xinglong Chen, San Jose, CA (US);
Weiyi Luo, Fremont, CA (US);
Zhong Qiang Hua, Saratoga, CA (US);
Siqing Lu, San Jose, CA (US);
Muhammad Rasheed, Fremont, CA (US);
Qiwei Liang, Fremont, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Ellie Y. Yieh, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A coil is provided for use in a semiconductor processing system to generate a plasma with a magnetic field in a chamber. The coil comprises a first coil segment, a second coil segment and an internal balance capacitor. The first coils segment has a first end and a second end. The first end of the coil segment is adapted to connect to a power source. The second coil segment has a first and second end. The second end of the first coil segment is adapted to connect to an external balance capacitor. The internal balance capacitor is connected in series between the second end of the first coil segment and the first end of the second coil segment. The internal balance capacitor and the coil segments are adapted to provide a voltage peak along the first coil segment substantially aligned with a virtual ground along the second coil segment.