The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Jun. 10, 2004
Shigeru Yokoi, Kanagawa, JP;
Kazumasa Wakiya, Kanagawa, JP;
Takayuki Haraguchi, Kanagawa, JP;
Makarem A. Hussein, Beaverton, OR (US);
Lana I. Jong, Hillsboro, OR (US);
Shan Christopher Clark, Forest Grove, OR (US);
Shigeru Yokoi, Kanagawa, JP;
Kazumasa Wakiya, Kanagawa, JP;
Takayuki Haraguchi, Kanagawa, JP;
Makarem A. Hussein, Beaverton, OR (US);
Lana I. Jong, Hillsboro, OR (US);
Shan Christopher Clark, Forest Grove, OR (US);
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Intel Corporation, Santa Clara, CA (US);
Abstract
A cleaning composition comprises at least quaternary ammonium hydroxide, a water-soluble organic solvent, water, an anticorrosive, and potassium hydroxide of 1 mass percent or less of a total amount of the solution. This cleaning composition can singly and effectively remove a photoresist film, a buried material, a metallic residue from the surface of a semiconductor substrate.