The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
Nov. 02, 2001
Kenji Watanabe, Kanagawa, JP;
Hirosi Sobukawa, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Tsutomu Karimata, Kanagawa, JP;
Mamoru Nakasuji, Kanagawa, JP;
Masahiro Hatakeyama, Kanagawa, JP;
Takeshi Murakami, Tokyo, JP;
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Ibaraki, JP;
Takamitsu Nagai, Kanagawa, JP;
Kazuyoshi Sugihara, Kanagawa, JP;
Kenji Watanabe, Kanagawa, JP;
Hirosi Sobukawa, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Tohru Satake, Kanagawa, JP;
Shoji Yoshikawa, Tokyo, JP;
Tsutomu Karimata, Kanagawa, JP;
Mamoru Nakasuji, Kanagawa, JP;
Masahiro Hatakeyama, Kanagawa, JP;
Takeshi Murakami, Tokyo, JP;
Yuichiro Yamazaki, Tokyo, JP;
Ichirota Nagahama, Ibaraki, JP;
Takamitsu Nagai, Kanagawa, JP;
Kazuyoshi Sugihara, Kanagawa, JP;
Ebara Corporation, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.